Measuring On-Chip Capacitance

Sun Microsystems Engineering, 2003-04

Liaison(s): Robert Hopkins ’01/02
Advisor(s): Qimin Yang
Students(s): Damian Small (PM), Brett Bissinger, Dan Chan, Renee Logan

The Clinic team designed, fabricated, and tested amplification circuits used in conjunction with a measurement circuit to accurately measure very small on-chip capacitances. The on-chip capacitors were simple metal structures with between 1 and 100 femto farads of capacitance, which is too small to be measured off chip with commonly available commercial test equipment.